HBO 6500W/PIL - Osram Microlithography ASML i-Line

Order code: 300-00-914501954
Downloads
Product datasheet 6500 PIHL_2020-03.pdf
Product specifications
Order code 300-00-914501954
Brand Osram
Power 6500W
Base SFa45-6/64.5
Diameter 92mm
OAL 372.5mm
LCL 174mm
Prod. type ASML
Cross reference
ASML Twinscan
ASML XT 4xOH/K/L series